Cao, W. et al. The future transistors. Nature 620, 501–515 (2023).
Lundstrom, M. S. & Alam, M. A. Moore’s law: the journey ahead. Science 378, 722–723 (2022).
Kim, T. I. et al. Injectable, cellular-scale optoelectronics with applications for wireless optogenetics. Science 340, 211–216 (2013).
Park, S. I. et al. Soft, stretchable, fully implantable miniaturized optoelectronic systems for wireless optogenetics. Nat. Biotechnol. 33, 1280–1286 (2015).
Behrman, K. & Kymissis, I. Micro light-emitting diodes. Nat. Electron. 5, 564–573 (2022).
Jin, S. X., Li, J., Li, J. Z., Lin, J. Y. & Jiang, H. X. GaN microdisk light emitting diodes. Appl. Phys. Lett. 76, 631–633 (2000).
Jiang, H. X., Jin, S. X., Li, J., Shakya, J. & Lin, J. Y. III-nitride blue microdisplays. Appl. Phys. Lett. 78, 1303–1305 (2001).
Huang, Y., Hsiang, E. L., Deng, M. Y. & Wu, S. T. Mini-LED, micro-LED and OLED displays: present status and future perspectives. Light Sci. Appl. 9, 105 (2020).
Shin, J. et al. Vertical full-colour micro-LEDs via 2D materials-based layer transfer. Nature 614, 81–87 (2023).
Amano, H., Kito, M., Hiramatsu, K. & Akasaki, I. p-type conduction in Mg-doped GaN treated with low-energy electron beam irradiation (LEEBI). Jpn. J. Appl. Phys. 28, L2112–L2114 (1989).
Nakamura, S., Mukai, T. & Senoh, M. Candela-class high-brightness InGaN/AlGaN double-heterostructure blue-light-emitting diodes. Appl. Phys. Lett. 64, 1687–1689 (1994).
Ponce, F. A. & Bour, D. P. Nitride-based semiconductors for blue and green light-emitting devices. Nature 386, 351–359 (1997).
Meng, W. et al. Three-dimensional monolithic micro-LED display driven by atomically thin transistor matrix. Nat. Nanotechnol. 16, 1231–1236 (2021).
Baek, W. et al. Ultra-low-current driven InGaN blue micro light-emitting diodes for electrically efficient and self-heating relaxed microdisplay. Nat. Commun. 14, 1386 (2023).
Meng, T. et al. Ultrahigh-resolution quantum-dot light-emitting diodes. Nat. Photon. 16, 297–303 (2022).
Zhao, J. et al. Large-area patterning of full-color quantum dot arrays beyond 1000 pixels per inch by selective electrophoretic deposition. Nat. Commun. 12, 4603 (2021).
Fan, J. & Qian, L. Quantum dot patterning by direct photolithography. Nat. Nanotechnol. 17, 906–907 (2022).
Liu, Z. et al. Micro-light-emitting diodes with quantum dots in display technology. Light Sci. Appl. 9, 83 (2020).
Deng, T. et al. Pixelated phosphor converter for laser-driven adaptive lighting. Laser Photonics Rev. 17, 2300240 (2023).
Park, J. et al. Electrically driven mid-submicrometre pixelation of InGaN micro-light-emitting diode displays for augmented-reality glasses. Nat. Photon. 15, 449–455 (2021).
Lu, B. et al. Dennard scaling in optoelectronics: scientific challenges and countermeasures of micro-LEDs for displays. Laser Photonics Rev. 16, 2100433 (2022).
Zhuang, Z., Iida, D. & Ohkawa, K. Investigation of InGaN-based red/green micro-light-emitting diodes. Opt. Lett. 46, 1912–1915 (2021).
Dussaigne, A. et al. Full InGaN red (625 nm) micro-LED (10 μm) demonstration on a relaxed pseudo-substrate. Appl. Phys. Express 14, 092011 (2021).
Sheen, M. et al. Highly efficient blue InGaN nanoscale light-emitting diodes. Nature 608, 56–61 (2022).
Liu, X. et al. N-polar InGaN nanowires: breaking the efficiency bottleneck of nano and micro LEDs. Photonics Res 10, 587–593 (2022).
Tan, Z.-K. et al. Bright light-emitting diodes based on organometal halide perovskite. Nat. Nanotechnol. 9, 687–692 (2014).
Cho, H. et al. Overcoming the electroluminescence efficiency limitations of perovskite light-emitting diodes. Science 350, 1222–1225 (2015).
Wang, N. et al. Perovskite light-emitting diodes based on solution-processed self-organized multiple quantum wells. Nat. Photon. 10, 699–704 (2016).
Yuan, M. et al. Perovskite energy funnels for efficient light-emitting diodes. Nat. Nanotechnol. 11, 872–877 (2016).
Liu, X. et al. Metal halide perovskites for light-emitting diodes. Nat. Mater. 20, 10–21 (2021).
Zhao, B. et al. High-efficiency perovskite–polymer bulk heterostructure light-emitting diodes. Nat. Photon. 12, 783–789 (2018).
Cao, Y. et al. Perovskite light-emitting diodes based on spontaneously formed submicrometre-scale structures. Nature 562, 249–253 (2018).
Lin, K. et al. Perovskite light-emitting diodes with external quantum efficiency exceeding 20 per cent. Nature 562, 245–248 (2018).
Chiba, T. et al. Anion-exchange red perovskite quantum dots with ammonium iodine salts for highly efficient light-emitting devices. Nat. Photon. 12, 681–687 (2018).
Sun, Y. et al. Bright and stable perovskite light-emitting diodes in the near-infrared range. Nature 615, 830–835 (2023).
Guo, B. et al. Ultrastable near-infrared perovskite light-emitting diodes. Nat. Photon. 16, 637–643 (2022).
Kim, J. et al. Ultra-bright, efficient and stable perovskite light-emitting diodes. Nature 611, 688–694 (2022).
Chen, W. et al. Highly bright and stable single-crystal perovskite light-emitting diodes. Nat. Photon. 17, 401–407 (2023).
Hsu, C. et al. Efficient mini/micro-perovskite light-emitting diodes. Cell Rep. Phys. Sci. 2, 100582 (2021).
Yang, X. et al. Towards micro-PeLED displays. Nat. Rev. Mater. 8, 341–353 (2023).
Liu, D. et al. Direct optical patterning of perovskite nanocrystals with ligand cross-linkers. Sci. Adv. 8, eabm8433 (2022).
Liu, D. et al. Nondestructive direct optical patterning of perovskite nanocrystals with carbene-based ligand cross-linkers. ACS Nano 18, 6896–6907 (2024).
Kim, M., Sadhukhan, P. & Myoung, J.-M. High-performance blue perovskite films and micro-arrays for light-emitting diodes with ionic liquid interlayer. Adv. Funct. Mater. 34, 2309436 (2023).
Jastrzebska-Perfect, P. et al. On-site growth of perovskite nanocrystal arrays for integrated nanodevices. Nat. Commun. 14, 3883 (2023).
Ren, A. et al. High-bandwidth perovskite photonic sources on silicon. Nat. Photon. 17, 798–805 (2023).
Bao, C. et al. Bidirectional optical signal transmission between two identical devices using perovskite diodes. Nat. Electron. 3, 156–164 (2020).
Xiong, J., Hsiang, E.-L., He, Z., Zhan, T. & Wu, S.-T. et al. Augmented reality and virtual reality displays: emerging technologies and future perspectives. Light Sci. Appl. 10, 216 (2021).
Kim, S. et al. Primary color generation from white organic light-emitting diodes using a cavity control layer for AR/VR applications. Org. Electron. 87, 105938 (2020).
Ding, S. et al. Phase dimensions resolving of efficient and stable perovskite light-emitting diodes at high brightness. Nat. Photon. 18, 363–370 (2024).
Ma, D. et al. Distribution control enables efficient reduced-dimensional perovskite LEDs. Nature 599, 594–598 (2021).
